Foundry Services

Dry Thermal Oxidation

Our ultra pure Dry Oxidation process is available for those applications requiring thinner oxides and is designed to ensure that you receive the highest quality film. Check out our Standard Dry Thermal Oxidation perimeters on the right.

We also offer the opportunity to customize our standard process to meet your needs. In many cases the temperature, ramp rates and gas flows can be modified to achieve the result you are looking for.

Dry Thermal Oxidation Dry Thermal Oxidation Dry Thermal Oxidation

DEVICE FABRICATION

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FOUNDRY SERVICES

Our MEMS Foundry maintains one of most diverse compilation of Thin Films Processes commercially available
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