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PECVD Silicon Carbide
PECVD Silicon Carbide is a highly durable thin film with many exciting characteristics that make it an attractive film for building specialized microelectronic devices. High thermal conductivity, high mechanical strength, and high Chemical inertness are just a few properties of this exceptional film. Since PECVD silicon carbide is resistant to KOH, you can also use this material as a hard mask for bulk micromachining of your finished wafers.
To learn more about silicon carbide please check our links page!
Our most popular sputtered films include:
- Titanium
- Chrome
- Aluminum
- Aluminum Alloys
- Copper
- Tantalum
- Silicon
- Silicon Nitride
DEVICE FABRICATION
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FOUNDRY SERVICES
Our MEMS Foundry maintains one of most diverse compilation of Thin Films Processes commercially available
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