Foundry Services
Nitride
Oxide
Silicon
Metals
Sputtered Metals
We understand how important quality is to you. Our Sputter process has been designed to deposit ultra-clean metal and dielectric films. An in-situ RF etch can be added to the process to insure good film adhesion and ohmic contact to underlying conductive layers.
Films available for deposition
We offer a wide variety of Sputtered non-precious metals, Dielectric films, and Silicon. Precious metals are available for E-Beam evaporation.
Our most popular Sputtered Films include:
- Titanium
- Chrome
- Aluminum
- Aluminum Alloys
- Copper
- Tantalum
- Silicon
- Silicon Nitride
DEVICE FABRICATION
Learn how our MEMS Foundry can reduce your cost, cut your lead time and increase your bottom line
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FOUNDRY SERVICES
Our MEMS Foundry maintains one of most diverse compilation of Thin Films Processes commercially available
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