Foundry Services
Nitride
Oxide
Silicon
Metals
Sputtered Silicon Nitride
Sputtered Silicon Nitride can be used as an antireflective coating or passivation layer and is a good alternative to our other deposited Nitrides. Adding sputtered nitride to the end of a metal deposition step can also prevent the oxidation of metals like Copper, and Aluminum, allowing you more process flexibility.
Our Sputter process has been designed to deposit ultra-clean metal and dielectric films. An in-situ RF Etch can be added to the process to insure good film adhesion and ohmic contact to underlying conductive layers.
Our most popular sputtered films include:
- Titanium
- Chrome
- Aluminum
- Aluminum Alloys
- Copper
- Tantalum
- Silicon
- Silicon Nitride
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FOUNDRY SERVICES
Our MEMS Foundry maintains one of most diverse compilation of Thin Films Processes commercially available
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