Phone: 541-774-1900

Sputtered Metals

We understand how important quality is to you.  Our Sputter process has been designed to deposit ultra-clean metal and dielectric films.  An in-situ RF etch can be added to the process to insure good film adhesion and ohmic contact to underlying conductive layers. 

Films available for deposition

We offer a wide variety of Sputtered non-precious metals, Dielectric films, and Silicon Precious metals are available for E-Beam evaporation.

Our most popular Sputtered Films include:

    • Titanium
    • Chrome
    • Aluminum
    • Aluminum Alloys
    • Copper
    • Tantalum
    • Silicon
    • Silicon Nitride
Sputtered Films
Thickness range Varies depending on metal
Thickness tolerance Target thickness +/-5%
Within wafer uniformity +/-5% or better
Wafer to wafer uniformity +/-5% or better
Sides processed One
Wafer size 50mm, 100mm, 125mm, 150mm, 200mm, 300mm
Wafer thickness Semi standard
Wafer material Silicon, Silicon on Insulator, Quartz
Gases Argon, Nitrogen
Equipment Sputter deposition tool

Please contact us directly with your Silicon Wafer and Thin Film Deposition requirements. We have a highly experienced engineering, and technical sales team awaiting your call. 541-774-1900 or Sales@RogueValleyMicro.com

 

We accept Visa, MasterCard, and American Express

Rogue Valley Microdevices is a high quality microelectronics manufacturing facility located in Southern Oregon's Rogue Valley specializing in world-class thin film deposition services. Our silicon wafer processing equipment is capable of volume manufacturing yet flexible enough to accommodate wafer sizes from 50mm to 200mm.

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